硅片生產流程
工(gong)藝過(guo)程綜(zong)述(shu) 硅(gui)(gui)片(pian)(pian)加工(gong)過(guo)程包括(kuo)許多步(bu)驟(zou)。所有(you)的(de)(de)(de)(de)(de)步(bu)驟(zou)概括(kuo)為三(san)個主要種(zhong)類：能(neng)(neng)修正物理性(xing)能(neng)(neng)如尺寸、形狀、平整度、或一些(xie)體材料的(de)(de)(de)(de)(de)性(xing)能(neng)(neng)；能(neng)(neng)減少不期望的(de)(de)(de)(de)(de)表(biao)面(mian)損傷的(de)(de)(de)(de)(de)數量；或能(neng)(neng)消(xiao)除表(biao)面(mian)沾污和顆(ke)粒。硅(gui)(gui)片(pian)(pian)加工(gong)的(de)(de)(de)(de)(de)主要的(de)(de)(de)(de)(de)步(bu)驟(zou)如表(biao)1.1的(de)(de)(de)(de)(de)典型流程所示(shi)。工(gong)藝步(bu)驟(zou)的(de)(de)(de)(de)(de)順序是(shi)很重要的(de)(de)(de)(de)(de)，因(yin)為這些(xie)步(bu)驟(zou)的(de)(de)(de)(de)(de)決定(ding)能(neng)(neng)使硅(gui)(gui)片(pian)(pian)受到盡可(ke)能(neng)(neng)少的(de)(de)(de)(de)(de)損傷并且可(ke)以(yi)減少硅(gui)(gui)片(pian)(pian)的(de)(de)(de)(de)(de)沾污。在以(yi)下的(de)(de)(de)(de)(de)章節中(zhong)，每一步(bu)驟(zou)都會(hui)得到詳細介紹。
硅片加工過程步驟
1. 切片(pian)
2. 激光標識
3. 倒角
4. 磨片
5. 腐蝕(shi)
6. 背(bei)損傷
7. 邊緣(yuan)鏡面(mian)拋光
8. 預(yu)熱清洗
9. 抵抗穩(wen)定——退火
10. 背封
11. 粘片
12. 拋光
13. 檢查前(qian)清洗
14. 外觀檢查
15. 金屬清洗
16. 擦片
17. 激光檢(jian)查
18. 包裝/貨運
切(qie)(qie)片(pian)(pian)(pian)（class 500k） 硅(gui)片(pian)(pian)(pian)加工的(de)(de)(de)(de)(de)介紹中(zhong)，從單(dan)(dan)晶硅(gui)棒(bang)開始的(de)(de)(de)(de)(de)第一個(ge)步驟就是切(qie)(qie)片(pian)(pian)(pian)。這(zhe)一步驟的(de)(de)(de)(de)(de)關鍵是如(ru)何在將單(dan)(dan)晶硅(gui)棒(bang)加工成(cheng)硅(gui)片(pian)(pian)(pian)時(shi)盡(jin)可能(neng)(neng)地(di)降低損(sun)耗，也(ye)(ye)就是要(yao)求(qiu)將單(dan)(dan)晶棒(bang)盡(jin)可能(neng)(neng)多地(di)加工成(cheng)有(you)(you)用(yong)(yong)(yong)的(de)(de)(de)(de)(de)硅(gui)片(pian)(pian)(pian)。為(wei)了(le)盡(jin)量得到最(zui)(zui)好(hao)的(de)(de)(de)(de)(de)硅(gui)片(pian)(pian)(pian)，硅(gui)片(pian)(pian)(pian)要(yao)求(qiu)有(you)(you)最(zui)(zui)小量的(de)(de)(de)(de)(de)翹曲和最(zui)(zui)少量的(de)(de)(de)(de)(de)刀縫損(sun)耗。切(qie)(qie)片(pian)(pian)(pian)過(guo)(guo)程(cheng)定(ding)義了(le)平(ping)整(zheng)度可以基本上適合器(qi)件的(de)(de)(de)(de)(de)制備。切(qie)(qie)片(pian)(pian)(pian)過(guo)(guo)程(cheng)中(zhong)有(you)(you)兩種(zhong)主要(yao)方式——內圓切(qie)(qie)割(ge)和線切(qie)(qie)割(ge)。這(zhe)兩種(zhong)形式的(de)(de)(de)(de)(de)切(qie)(qie)割(ge)方式被(bei)應用(yong)(yong)(yong)的(de)(de)(de)(de)(de)原因(yin)是它(ta)們能(neng)(neng)將材料損(sun)失減少到最(zui)(zui)小，對(dui)硅(gui)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)損(sun)傷(shang)也(ye)(ye)最(zui)(zui)小，并且(qie)允許(xu)硅(gui)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)翹曲也(ye)(ye)是最(zui)(zui)小。切(qie)(qie)片(pian)(pian)(pian)是一個(ge)相對(dui)較臟的(de)(de)(de)(de)(de)過(guo)(guo)程(cheng)，可以描(miao)述為(wei)一個(ge)研(yan)磨(mo)的(de)(de)(de)(de)(de)過(guo)(guo)程(cheng)，這(zhe)一過(guo)(guo)程(cheng)會產生大(da)量的(de)(de)(de)(de)(de)顆(ke)粒(li)和大(da)量的(de)(de)(de)(de)(de)很淺表面損(sun)傷(shang)。 硅(gui)片(pian)(pian)(pian)切(qie)(qie)割(ge)完成(cheng)后，所(suo)粘的(de)(de)(de)(de)(de)碳板和用(yong)(yong)(yong)來粘碳板的(de)(de)(de)(de)(de)粘結劑必須從硅(gui)片(pian)(pian)(pian)上清除。在這(zhe)清除和清洗過(guo)(guo)程(cheng)中(zhong)，很重要(yao)的(de)(de)(de)(de)(de)一點就是保持硅(gui)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)順序(xu)，因(yin)為(wei)這(zhe)時(shi)它(ta)們還沒有(you)(you)被(bei)標識區分。
激(ji)光(guang)標(biao)識(Class 500k) 在(zai)晶(jing)棒被切(qie)割成一(yi)(yi)片(pian)(pian)(pian)片(pian)(pian)(pian)硅片(pian)(pian)(pian)之后，硅片(pian)(pian)(pian)會被用激(ji)光(guang)刻(ke)上標(biao)識。一(yi)(yi)臺高(gao)功率的(de)(de)激(ji)光(guang)打印機(ji)用來在(zai)硅片(pian)(pian)(pian)表面刻(ke)上標(biao)識。硅片(pian)(pian)(pian)按從晶(jing)棒切(qie)割下的(de)(de)相同順(shun)序進行編(bian)碼(ma)(ma)(ma)，因而能知道硅片(pian)(pian)(pian)的(de)(de)正(zheng)確位置。這一(yi)(yi)編(bian)碼(ma)(ma)(ma)應(ying)是統一(yi)(yi)的(de)(de)，用來識別硅片(pian)(pian)(pian)并知道它(ta)的(de)(de)來源。編(bian)碼(ma)(ma)(ma)能表明(ming)該硅片(pian)(pian)(pian)從哪(na)一(yi)(yi)單(dan)晶(jing)棒的(de)(de)什么位置切(qie)割下來的(de)(de)。保(bao)持這樣的(de)(de)追溯是很重要的(de)(de)，因為單(dan)晶(jing)的(de)(de)整(zheng)體特性會隨著晶(jing)棒的(de)(de)一(yi)(yi)頭(tou)到(dao)(dao)另一(yi)(yi)頭(tou)而變化。編(bian)號需(xu)刻(ke)的(de)(de)足(zu)夠深，從而到(dao)(dao)最終硅片(pian)(pian)(pian)拋(pao)光(guang)完(wan)畢后仍能保(bao)持。在(zai)硅片(pian)(pian)(pian)上刻(ke)下編(bian)碼(ma)(ma)(ma)后，即使硅片(pian)(pian)(pian)有遺漏，也(ye)能追溯到(dao)(dao)原來位置，而且如果趨(qu)向(xiang)明(ming)了(le)，那么就可以采取正(zheng)確的(de)(de)措施。激(ji)光(guang)標(biao)識可以在(zai)硅片(pian)(pian)(pian)的(de)(de)正(zheng)面也(ye)可在(zai)背面，盡(jin)管(guan)正(zheng)面通常會被用到(dao)(dao)。
倒角 當切片完(wan)成(cheng)后，硅(gui)(gui)片有比(bi)較(jiao)尖利(li)的(de)(de)邊(bian)緣(yuan)(yuan)，就需要進行(xing)倒角從而形成(cheng)子(zi)彈式的(de)(de)光(guang)滑的(de)(de)邊(bian)緣(yuan)(yuan)。倒角后的(de)(de)硅(gui)(gui)片邊(bian)緣(yuan)(yuan)有低的(de)(de)中心應力，因而使之更牢(lao)固。這個(ge)硅(gui)(gui)片邊(bian)緣(yuan)(yuan)的(de)(de)強(qiang)化，能(neng)使
表(biao)面(mian)(mian)(mian)(mian)為(wei)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)提供(gong)了(le)(le)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)個固(gu)體(ti)(ti)參考平(ping)面(mian)(mian)(mian)(mian)。粘(zhan)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)蠟(la)能(neng)(neng)防(fang)止(zhi)當(dang)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)在(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)側面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)載(zai)體(ti)(ti)下拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)(shi)(shi)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)移動。蠟(la)粘(zhan)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)只對(dui)(dui)單面(mian)(mian)(mian)(mian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)有(you)(you)用(yong)(yong)。另一(yi)(yi)(yi)(yi)(yi)(yi)(yi)方(fang)法(fa)(fa)就是(shi)(shi)(shi)(shi)模板粘(zhan)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)，有(you)(you)兩(liang)(liang)(liang)種(zhong)不(bu)同變異。一(yi)(yi)(yi)(yi)(yi)(yi)(yi)種(zhong)只適用(yong)(yong)于(yu)單面(mian)(mian)(mian)(mian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)，用(yong)(yong)這(zhe)(zhe)(zhe)(zhe)種(zhong)方(fang)法(fa)(fa)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)被(bei)(bei)固(gu)定(ding)在(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)圓的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)模板上(shang)(shang)(shang)(shang)，再(zai)放置在(zai)(zai)(zai)(zai)(zai)軟(ruan)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)襯墊上(shang)(shang)(shang)(shang)。這(zhe)(zhe)(zhe)(zhe)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)襯墊能(neng)(neng)提供(gong)足(zu)夠的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)摩擦力(li)因而(er)(er)(er)(er)在(zai)(zai)(zai)(zai)(zai)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)(shi)(shi)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)邊緣不(bu)會(hui)完(wan)全支撐到(dao)側面(mian)(mian)(mian)(mian)載(zai)體(ti)(ti)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)就不(bu)是(shi)(shi)(shi)(shi)硬(ying)(ying)接(jie)(jie)觸(chu)，而(er)(er)(er)(er)是(shi)(shi)(shi)(shi)“漂浮”在(zai)(zai)(zai)(zai)(zai)物體(ti)(ti)上(shang)(shang)(shang)(shang)。當(dang)正面(mian)(mian)(mian)(mian)進(jin)行(xing)(xing)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)(shi)(shi)，單面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)粘(zhan)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)保護了(le)(le)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)背面(mian)(mian)(mian)(mian)。另一(yi)(yi)(yi)(yi)(yi)(yi)(yi)種(zhong)方(fang)法(fa)(fa)適用(yong)(yong)于(yu)雙面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)。用(yong)(yong)這(zhe)(zhe)(zhe)(zhe)種(zhong)方(fang)法(fa)(fa)，放置硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)模板上(shang)(shang)(shang)(shang)下兩(liang)(liang)(liang)側都是(shi)(shi)(shi)(shi)敞開(kai)(kai)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)，通(tong)常(chang)兩(liang)(liang)(liang)面(mian)(mian)(mian)(mian)都敞開(kai)(kai)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)模板稱(cheng)為(wei)載(zai)體(ti)(ti)。這(zhe)(zhe)(zhe)(zhe)種(zhong)方(fang)法(fa)(fa)可(ke)以(yi)允許在(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)臺機器上(shang)(shang)(shang)(shang)進(jin)行(xing)(xing)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)(shi)(shi)，兩(liang)(liang)(liang)面(mian)(mian)(mian)(mian)能(neng)(neng)同時(shi)(shi)(shi)(shi)進(jin)行(xing)(xing)，操作類似(si)于(yu)磨(mo)(mo)(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)機。硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)兩(liang)(liang)(liang)個拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)襯墊放置在(zai)(zai)(zai)(zai)(zai)相反的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)方(fang)向(xiang)，這(zhe)(zhe)(zhe)(zhe)樣硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)被(bei)(bei)推(tui)向(xiang)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)個方(fang)向(xiang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)頂部時(shi)(shi)(shi)(shi)和(he)(he)相反方(fang)向(xiang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)底部，產生的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)應力(li)會(hui)相互抵消(xiao)。這(zhe)(zhe)(zhe)(zhe)就有(you)(you)利于(yu)防(fang)止(zhi)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)被(bei)(bei)推(tui)向(xiang)堅硬(ying)(ying)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)載(zai)體(ti)(ti)而(er)(er)(er)(er)導致硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)邊緣遭(zao)到(dao)損(sun)壞(huai)。除(chu)(chu)(chu)了(le)(le)許多(duo)加(jia)載(zai)在(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)邊緣負荷，當(dang)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)隨載(zai)體(ti)(ti)運(yun)轉時(shi)(shi)(shi)(shi)，邊緣不(bu)大可(ke)能(neng)(neng)會(hui)被(bei)(bei)損(sun)壞(huai)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)（Class ≤1k） 硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)目的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)是(shi)(shi)(shi)(shi)得到(dao)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)非常(chang)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)滑、平(ping)整、無(wu)任(ren)何損(sun)傷(shang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)表(biao)面(mian)(mian)(mian)(mian)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)(guo)(guo)程(cheng)(cheng)類似(si)于(yu)磨(mo)(mo)(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)(guo)(guo)程(cheng)(cheng)，只是(shi)(shi)(shi)(shi)過(guo)(guo)(guo)(guo)程(cheng)(cheng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)基礎不(bu)同。磨(mo)(mo)(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)時(shi)(shi)(shi)(shi)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)進(jin)行(xing)(xing)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)是(shi)(shi)(shi)(shi)機械(xie)(xie)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)研(yan)磨(mo)(mo)(mo)(mo)；而(er)(er)(er)(er)在(zai)(zai)(zai)(zai)(zai)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)(shi)(shi)，是(shi)(shi)(shi)(shi)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)個化(hua)學(xue)/機械(xie)(xie)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)(guo)(guo)程(cheng)(cheng)。這(zhe)(zhe)(zhe)(zhe)個在(zai)(zai)(zai)(zai)(zai)操作原(yuan)理上(shang)(shang)(shang)(shang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)不(bu)同是(shi)(shi)(shi)(shi)造成(cheng)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)能(neng)(neng)比磨(mo)(mo)(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)得到(dao)更(geng)(geng)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)滑表(biao)面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)原(yuan)因。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)(shi)(shi)，用(yong)(yong)特(te)(te)制的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)襯墊和(he)(he)特(te)(te)殊(shu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)對(dui)(dui)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)進(jin)行(xing)(xing)化(hua)學(xue)/機械(xie)(xie)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)。硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)面(mian)(mian)(mian)(mian)是(shi)(shi)(shi)(shi)旋轉的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)，在(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)定(ding)壓力(li)下，并經覆(fu)蓋(gai)在(zai)(zai)(zai)(zai)(zai)襯墊上(shang)(shang)(shang)(shang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)研(yan)磨(mo)(mo)(mo)(mo)砂(sha)(sha)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)由硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠和(he)(he)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)特(te)(te)殊(shu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)高pH值的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)化(hua)學(xue)試(shi)(shi)劑組成(cheng)。這(zhe)(zhe)(zhe)(zhe)種(zhong)高pH的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)化(hua)學(xue)試(shi)(shi)劑能(neng)(neng)氧化(hua)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)面(mian)(mian)(mian)(mian)，又以(yi)機械(xie)(xie)方(fang)式用(yong)(yong)含有(you)(you)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)將氧化(hua)層(ceng)從表(biao)面(mian)(mian)(mian)(mian)磨(mo)(mo)(mo)(mo)去(qu)(qu)。硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)通(tong)常(chang)要(yao)(yao)經多(duo)步拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)。第(di)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)步是(shi)(shi)(shi)(shi)粗(cu)拋(pao)(pao)(pao)(pao)，用(yong)(yong)較(jiao)硬(ying)(ying)襯墊，拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)更(geng)(geng)易與之(zhi)反應，而(er)(er)(er)(er)且比后(hou)(hou)(hou)面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)中(zhong)(zhong)用(yong)(yong)到(dao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)砂(sha)(sha)中(zhong)(zhong)有(you)(you)更(geng)(geng)多(duo)粗(cu)糙的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠顆(ke)(ke)粒(li)。第(di)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)步是(shi)(shi)(shi)(shi)為(wei)了(le)(le)清(qing)(qing)(qing)除(chu)(chu)(chu)腐蝕斑和(he)(he)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)些機械(xie)(xie)損(sun)傷(shang)。在(zai)(zai)(zai)(zai)(zai)接(jie)(jie)下來的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)中(zhong)(zhong)，用(yong)(yong)軟(ruan)襯、含較(jiao)少化(hua)學(xue)試(shi)(shi)劑和(he)(he)細的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠顆(ke)(ke)粒(li)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)。清(qing)(qing)(qing)除(chu)(chu)(chu)剩余損(sun)傷(shang)和(he)(he)薄霧的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)最(zui)終的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)稱(cheng)為(wei)精拋(pao)(pao)(pao)(pao)。檢(jian)(jian)查前清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)（class 10） 硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)后(hou)(hou)(hou)，表(biao)面(mian)(mian)(mian)(mian)有(you)(you)大量(liang)(liang)(liang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)沾污物，絕大部分(fen)是(shi)(shi)(shi)(shi)來自于(yu)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)過(guo)(guo)(guo)(guo)程(cheng)(cheng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)顆(ke)(ke)粒(li)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)過(guo)(guo)(guo)(guo)程(cheng)(cheng)是(shi)(shi)(shi)(shi)一(yi)(yi)(yi)(yi)(yi)(yi)(yi)個化(hua)學(xue)/機械(xie)(xie)過(guo)(guo)(guo)(guo)程(cheng)(cheng)，集中(zhong)(zhong)了(le)(le)大量(liang)(liang)(liang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)顆(ke)(ke)粒(li)。為(wei)了(le)(le)能(neng)(neng)對(dui)(dui)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)進(jin)行(xing)(xing)檢(jian)(jian)查，需進(jin)行(xing)(xing)清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)以(yi)除(chu)(chu)(chu)去(qu)(qu)大部分(fen)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)顆(ke)(ke)粒(li)。通(tong)過(guo)(guo)(guo)(guo)這(zhe)(zhe)(zhe)(zhe)次清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)潔度(du)仍(reng)不(bu)能(neng)(neng)滿足(zu)客(ke)戶的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)要(yao)(yao)求(qiu)，但能(neng)(neng)對(dui)(dui)其進(jin)行(xing)(xing)檢(jian)(jian)查了(le)(le)通(tong)常(chang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)方(fang)法(fa)(fa)是(shi)(shi)(shi)(shi)在(zai)(zai)(zai)(zai)(zai)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)后(hou)(hou)(hou)用(yong)(yong)RCA SC-1清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)液。有(you)(you)時(shi)(shi)(shi)(shi)用(yong)(yong)SC-1清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)時(shi)(shi)(shi)(shi)，同時(shi)(shi)(shi)(shi)還用(yong)(yong)磁超聲清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)能(neng)(neng)更(geng)(geng)為(wei)有(you)(you)效。另一(yi)(yi)(yi)(yi)(yi)(yi)(yi)方(fang)法(fa)(fa)是(shi)(shi)(shi)(shi)先用(yong)(yong)H2SO4/H2O2，再(zai)用(yong)(yong)HF清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)。相比之(zhi)下，這(zhe)(zhe)(zhe)(zhe)種(zhong)方(fang)法(fa)(fa)更(geng)(geng)能(neng)(neng)有(you)(you)效清(qing)(qing)(qing)除(chu)(chu)(chu)金(jin)屬(shu)(shu)(shu)沾污。經過(guo)(guo)(guo)(guo)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)、清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)之(zhi)后(hou)(hou)(hou)，就可(ke)以(yi)進(jin)行(xing)(xing)檢(jian)(jian)查了(le)(le)。在(zai)(zai)(zai)(zai)(zai)檢(jian)(jian)查過(guo)(guo)(guo)(guo)程(cheng)(cheng)中(zhong)(zhong)，電阻率、翹曲度(du)、總(zong)厚度(du)超差和(he)(he)平(ping)整度(du)等都要(yao)(yao)測(ce)試(shi)(shi)。所(suo)(suo)有(you)(you)這(zhe)(zhe)(zhe)(zhe)些測(ce)量(liang)(liang)(liang)參數都要(yao)(yao)用(yong)(yong)無(wu)接(jie)(jie)觸(chu)方(fang)法(fa)(fa)測(ce)試(shi)(shi)，因而(er)(er)(er)(er)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)(guang)面(mian)(mian)(mian)(mian)才(cai)不(bu)會(hui)受(shou)到(dao)損(sun)傷(shang)。在(zai)(zai)(zai)(zai)(zai)這(zhe)(zhe)(zhe)(zhe)點上(shang)(shang)(shang)(shang)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)必須(xu)最(zui)終滿足(zu)客(ke)戶的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)尺寸性能(neng)(neng)要(yao)(yao)求(qiu)，否則就會(hui)被(bei)(bei)淘汰(tai)。金(jin)屬(shu)(shu)(shu)物去(qu)(qu)除(chu)(chu)(chu)清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi) 硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)檢(jian)(jian)查完(wan)后(hou)(hou)(hou)，就要(yao)(yao)進(jin)行(xing)(xing)最(zui)終的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)以(yi)清(qing)(qing)(qing)除(chu)(chu)(chu)剩余在(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)所(suo)(suo)有(you)(you)顆(ke)(ke)粒(li)。主要(yao)(yao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)沾污物是(shi)(shi)(shi)(shi)檢(jian)(jian)查前清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)后(hou)(hou)(hou)仍(reng)留在(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)金(jin)屬(shu)(shu)(shu)離(li)(li)子(zi)。這(zhe)(zhe)(zhe)(zhe)些金(jin)屬(shu)(shu)(shu)離(li)(li)子(zi)來自于(yu)各不(bu)同的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)用(yong)(yong)到(dao)金(jin)屬(shu)(shu)(shu)與硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)接(jie)(jie)觸(chu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)加(jia)工過(guo)(guo)(guo)(guo)程(cheng)(cheng)，如切片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)、磨(mo)(mo)(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)。一(yi)(yi)(yi)(yi)(yi)(yi)(yi)些金(jin)屬(shu)(shu)(shu)離(li)(li)子(zi)甚至來自于(yu)前面(mian)(mian)(mian)(mian)幾個清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)過(guo)(guo)(guo)(guo)程(cheng)(cheng)中(zhong)(zhong)用(yong)(yong)到(dao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)化(hua)學(xue)試(shi)(shi)劑。因此，最(zui)終的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)主要(yao)(yao)是(shi)(shi)(shi)(shi)為(wei)了(le)(le)清(qing)(qing)(qing)除(chu)(chu)(chu)殘(can)留在(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)面(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)金(jin)屬(shu)(shu)(shu)離(li)(li)子(zi)。這(zhe)(zhe)(zhe)(zhe)樣做的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)原(yuan)因是(shi)(shi)(shi)(shi)金(jin)屬(shu)(shu)(shu)離(li)(li)子(zi)能(neng)(neng)導致少數載(zai)流子(zi)壽命(ming)，從而(er)(er)(er)(er)會(hui)使(shi)器件(jian)性能(neng)(neng)降(jiang)低。SC-1標準清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)液對(dui)(dui)清(qing)(qing)(qing)除(chu)(chu)(chu)金(jin)屬(shu)(shu)(shu)離(li)(li)子(zi)不(bu)是(shi)(shi)(shi)(shi)很有(you)(you)效。因此，要(yao)(yao)用(yong)(yong)不(bu)同的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)洗(xi)(xi)(xi)(xi)液，如HCl，必須(xu)用(yong)(yong)到(dao)。
擦(ca)片(pian) 在用HCl清(qing)(qing)洗完硅(gui)片(pian)后，可(ke)能還會在表(biao)面吸附一些顆粒(li)。一些制造商(shang)選擇PVA制的刷子來清(qing)(qing)除這些殘留顆粒(li)。在擦(ca)洗過程中，純水或氨水（NH4OH）應流經硅(gui)片(pian)表(biao)面以帶(dai)走(zou)沾附的顆粒(li)。用PVA擦(ca)片(pian)是清(qing)(qing)除顆粒(li)的有效手段。
激(ji)光檢查(cha) 硅片(pian)的(de)(de)最終清洗完成后，就(jiu)需要檢查(cha)表面顆粒和(he)表面缺(que)陷。激(ji)光檢查(cha)儀能探測(ce)到表面的(de)(de)顆粒和(he)缺(que)陷。因(yin)為(wei)激(ji)光是短波(bo)中(zhong)高強度的(de)(de)波(bo)源。激(ji)光在硅片(pian)表面反射。如(ru)果(guo)表面沒有任(ren)何(he)問題(ti)，光(guang)打(da)到(dao)(dao)硅片(pian)表面就(jiu)會以(yi)相(xiang)同(tong)角度(du)反(fan)射(she)。然而，如果光(guang)打(da)到(dao)(dao)顆(ke)粒(li)上(shang)或打(da)到(dao)(dao)粗(cu)糙的平面上(shang)，光(guang)就(jiu)不會以(yi)相(xiang)同(tong)角度(du)反(fan)射(she)。反(fan)射(she)的光(guang)會向各個方(fang)向傳(chuan)播并能在(zai)不同(tong)角度(du)被探測到(dao)(dao)。
包(bao)(bao)裝(zhuang)(zhuang)/貨(huo)運(yun) 盡管如(ru)此，可(ke)能(neng)(neng)(neng)還沒有(you)考(kao)慮的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)非(fei)常周到(dao)，硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)包(bao)(bao)裝(zhuang)(zhuang)是(shi)(shi)(shi)非(fei)常重要(yao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)。包(bao)(bao)裝(zhuang)(zhuang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)目(mu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)是(shi)(shi)(shi)為(wei)(wei)(wei)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)提(ti)供(gong)一(yi)(yi)個無塵的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)環(huan)(huan)境(jing)，并使硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)在(zai)運(yun)輸時不(bu)(bu)受(shou)(shou)到(dao)任何(he)損(sun)傷；包(bao)(bao)裝(zhuang)(zhuang)還可(ke)以防止硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)受(shou)(shou)潮(chao)。如(ru)果一(yi)(yi)片(pian)(pian)(pian)(pian)(pian)(pian)好(hao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)被(bei)放置在(zai)一(yi)(yi)容器內，并讓它(ta)受(shou)(shou)到(dao)污染，它(ta)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)污染程(cheng)(cheng)度會(hui)與在(zai)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)加(jia)(jia)工過(guo)(guo)程(cheng)(cheng)中的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)任何(he)階段一(yi)(yi)樣(yang)嚴重，甚至(zhi)認為(wei)(wei)(wei)這(zhe)是(shi)(shi)(shi)更嚴重的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)問題(ti)，因為(wei)(wei)(wei)在(zai)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)生(sheng)產過(guo)(guo)程(cheng)(cheng)中，隨著每(mei)一(yi)(yi)步驟的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)完成(cheng)(cheng)，硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)價值(zhi)也在(zai)不(bu)(bu)斷上(shang)升。理想(xiang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)包(bao)(bao)裝(zhuang)(zhuang)是(shi)(shi)(shi)既(ji)能(neng)(neng)(neng)提(ti)供(gong)清潔的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)環(huan)(huan)境(jing)，又(you)能(neng)(neng)(neng)控制保(bao)存和(he)(he)運(yun)輸時的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)小(xiao)環(huan)(huan)境(jing)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)整潔。典型(xing)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)運(yun)輸用(yong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)容器是(shi)(shi)(shi)用(yong)聚(ju)丙烯(xi)、聚(ju)乙(yi)烯(xi)或一(yi)(yi)些其(qi)他塑料材料制成(cheng)(cheng)。這(zhe)些塑料應不(bu)(bu)會(hui)釋放任何(he)氣(qi)體(ti)并且是(shi)(shi)(shi)無塵的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)，如(ru)此硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)表面才不(bu)(bu)會(hui)被(bei)污染。 電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)片(pian)(pian)(pian)(pian)(pian)(pian)一(yi)(yi)般分為(wei)(wei)(wei)單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)、多晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)、和(he)(he)非(fei)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui) 單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)是(shi)(shi)(shi)當(dang)前開發得最快的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)一(yi)(yi)種(zhong)太(tai)(tai) 陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)，它(ta)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)構造和(he)(he)生(sheng)產工藝已(yi)定(ding)型(xing)，產品已(yi)廣(guang)泛用(yong)于空間和(he)(he)地(di)面。這(zhe)種(zhong)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)以高純的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)棒(bang)為(wei)(wei)(wei)原料。為(wei)(wei)(wei)了 降低(di)生(sheng)產成(cheng)(cheng)本，現在(zai)地(di)面應用(yong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)等(deng)采用(yong)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)級的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)棒(bang)，材料性(xing)能(neng)(neng)(neng)指標有(you)所放寬。有(you)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)也可(ke)使用(yong)半導(dao)體(ti)器件(jian)加(jia)(jia)工的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)頭尾料和(he)(he)廢次(ci)單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)材料，經(jing)過(guo)(guo)復 拉制成(cheng)(cheng)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)專(zhuan)用(yong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)棒(bang)。 將(jiang)單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)棒(bang)切成(cheng)(cheng)片(pian)(pian)(pian)(pian)(pian)(pian)，一(yi)(yi)般片(pian)(pian)(pian)(pian)(pian)(pian)厚約0.3毫米(mi)。硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)經(jing)過(guo)(guo)拋磨、清洗等(deng)工序，制成(cheng)(cheng)待加(jia)(jia)工的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)原料硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)。加(jia)(jia)工太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)片(pian)(pian)(pian)(pian)(pian)(pian)，首先要(yao)在(zai)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)上(shang)摻雜和(he)(he)擴散(san)，一(yi)(yi)般摻雜物為(wei)(wei)(wei) 微量的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硼(peng)、磷、銻(ti)等(deng)。擴散(san)是(shi)(shi)(shi)在(zai)石英管制成(cheng)(cheng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)高溫擴散(san)爐中進(jin)行。這(zhe)樣(yang)就(jiu)(jiu)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)上(shang)形成(cheng)(cheng)P>N結(jie)。然后采用(yong)絲網印刷法，精配好(hao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)銀漿(jiang)印在(zai)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)上(shang)做成(cheng)(cheng)柵(zha)線(xian)，經(jing) 過(guo)(guo)燒(shao)結(jie)，同時制成(cheng)(cheng)背電(dian)(dian)(dian)(dian)(dian)(dian)極，并在(zai)有(you)柵(zha)線(xian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)面涂覆減反(fan)射(she)源，以防大(da)量的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)光子被(bei)光滑的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)表面反(fan)射(she)掉。因此，單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)體(ti)片(pian)(pian)(pian)(pian)(pian)(pian)就(jiu)(jiu)制成(cheng)(cheng)了。單(dan)(dan)(dan)(dan)體(ti)片(pian)(pian)(pian)(pian)(pian)(pian)經(jing)過(guo)(guo)抽查 檢驗(yan)，即可(ke)按所需(xu)要(yao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)規格組裝(zhuang)(zhuang)成(cheng)(cheng)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)組件(jian)（太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)板），用(yong)串聯(lian)(lian)和(he)(he)并聯(lian)(lian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)方法構成(cheng)(cheng)一(yi)(yi)定(ding)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)輸出電(dian)(dian)(dian)(dian)(dian)(dian)壓和(he)(he)電(dian)(dian)(dian)(dian)(dian)(dian)流。最后用(yong)框架和(he)(he)材料進(jin)行封裝(zhuang)(zhuang)。用(yong)戶(hu)根據(ju)系統(tong) 設計，可(ke)將(jiang)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)組件(jian)組成(cheng)(cheng)各(ge)種(zhong)大(da)小(xiao)不(bu)(bu)同的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)方陣，亦(yi)稱(cheng)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)陣列(lie)。目(mu)前單(dan)(dan)(dan)(dan)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)太(tai)(tai)陽(yang)(yang)(yang)能(neng)(neng)(neng)電(dian)(dian)(dian)(dian)(dian)(dian)池(chi)(chi)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)光電(dian)(dian)(dian)(dian)(dian)(dian)轉換效率為(wei)(wei)(wei)15％左右，實驗(yan)室(shi)成(cheng)(cheng)果也有(you) 20％以上(shang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)。
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